21012 長尺配管を有する3次元6自由度空気圧式アクティブ除振装置の制御に関する研究(実システムのモデリングと制御(3):アクティブ除振,OS2 実システムのモデリングと制御)

概要

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Recently, influence of micro vibration on precision machines is increasing in many high technology fields such as semiconductor manufacturing. Therefore, active vibration isolation devices equipped with air actuators and sensors come into use for the micro vibration control field, and these active vibration isolation devices have achieved good vibration performance. Recently, active vibration isolation devices are required in very strong magnetic field such as NMR. In conventional devices, the servo valves which provide actuators with air are set up on actuators directly. However, in strong magnetic field, servo valves need to be separated from actuators by using long pipes to avoid the effect of magnetic field, and this long pipe changes the dynamics of the device itself. In this study, simulations and experiments are conducted for the above vibration isolation device with long pipe system, and the effectiveness of the proposed MM control system is verified.
2006-03-09