Effect of Low-Molecula-Weight Novolak Resin on Microgrooves : Resist and Processes

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-04-30

著者

• NAKANO Ryotaro

  Department of Electronics and Bioinformatics, Science and Technology, Meiji University

• Hirose Minoru

  Process Development Division Fujitsu Limited

• Nakano R

  Department Of Electronics And Bioinformatics Science And Technology Meiji University

• Nakano Ritsuko

  Process Development Division Fujitsu Limited

• Shigematsu Koji

  Central Research Laboratory Mitsui Mining & Smelting Co. Ltd.

• Shigematsu K

  Faculty Of Education Iwate University

• Nakagawa K

  Nagaoka Univ. Technol. Nagaoka‐shi Jpn

• Hirose M

  Materials Research Center Tdk Corporation

• SANTOH Nobuaki

  Process Development Division, Fujitsu Limited

• NAKAGAWA Kenji

  Process Development Division, Fujitsu Limited

• SHIGEMATSU Kazumasa

  Semiconductor Process Laboratory, Fujitsu VLSI Limited

• Santoh Nobuaki

  Process Development Division Fujitsu Limited

• Shigematsu K

  Nippondenso Co. Ltd. Aichi

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