Preparation of Platinum Palladium Monoxide Pt_<1-x>Pd_xO Thin Films

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Platinum palladium monoxide (Pt1-xPdxO) thin films with an arbitrary composition, where 0≤x≤1, were prepared by reactive cosputtering of platinum and palladium targets. The oxidation states of each atom of Pt and Pd were confirmed as that of PtO and PdO, respectively. Two infrared absorption peaks were found in the mid-infrared region and they exhibited linear peak shifts toward a lower wavenumber with increasing x. Thus, we completed successful preparation of Pt1-xPdxO thin films with a homogeneous phase. The crystallinity of the Pt1-xPdxO thin films improved when the composition exceeded x=0.56. The preferred orientation changed continuously between x=0 (PtO) and x=1 (PdO). The optical bandgap decreased when x decreased from 1, and became unclear in a low Pd content region, including x=0 (PtO).
2010-02-20