0.15μm Gate i-AlGaAs/n-GaAs HIGFET with a 13.3 S/Vcm K-Value (Special Issue on Heterostructure Electron Devices)

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概要

• 論文の詳細を見る

• We have developed a new HIGFET structure achieving an extremely high K-value of 13.3 S / Vcm with a gate length of 0.15 μm. Self-aligned ion implantation is excluded to suppress a short-channel effect. An i-GaAs cap layer and an n^+-GaAs contact layer are employed to reduce source resistance. The threshold voltage shift is as small as 50 mV when the gate length is reduced from 1.5 μm to 0.15 μm. Source resistance is estimated to be 53 mΩcm. We have also developed a new fabrication process that can achieve a shorter gate length than the minimum size of lithography. This process utilizes an SiO_2 sidewall formed on the n^+-GaAs contact layer to reduce the gate length. A gate length of 0.15 μm can be achieved using 0.35 μm lithography.

• 社団法人電子情報通信学会の論文
• 1993-09-25

著者

• MATSUMOTO Hironaga

  Department of Electronics and Bioinformatics, Science and Technology, Meiji University

• Ohishi Yasutake

  Ntt Opto-electronics Laboratories

• Hosomi Kazuhiko

  Nanoelectronics Collaborative Research Center Institute Of Industrial Science University Of Tokyo

• Matsumoto Hironaga

  Department Of Electronics And Bioinformatics Science And Technology Meiji University

• Miyazaki M

  Hitachi Ltd. Kokubunji‐shi Jpn

• Ohishi Yoshihisa

  Ntt Opto-electronics Laboratories

• Matsumoto Hidetoshi

  Central Research Laboratory, Hitachi, Ltd.

• Umemoto Yasunari

  Central Research Laboratory, Hitachi, Ltd.

• Ohishi Yoshihisa

  Central Research Laboratory, Hitachi, Ltd.

• Takahama Mitsuharu

  Central Research Laboratory, Hitachi, Ltd.

• Hiruma Kenji

  Central Research Laboratory, Hitachi, Ltd.

• Oda Hiroto

  Hitachi VLSI Engineering Corporation

• Miyazaki Masaru

  Central Research Laboratory, Hitachi, Ltd.

• Imamura Yoshinori

  Central Research Laboratory, Hitachi, Ltd.

• Oda H

  Hitachi Ulsi Engineering Corp. Tokyo Jpn

• Hiruma Kenji

  Central Research Laboratory Hitachi Ltd.

• Haraguchi Kei-ichi

  Central Research Laboratory Hitachi Ltd.

• Hiruma K

  Central Research Laboratory Hitachi Ltd.

• Oda Hiroto

  Hitachi Ulsi Engineering Corporation

• Matsumoto Hidetoshi

  Department Of Electronics And Bioinformatics Science And Technology Meiji University

• Imamura Yoshinori

  Central Research Laboratory

• Imamura Y

  Renesas Device Design Itami‐shi Japan

• Matsumoto Hidetoshi

  Central Research Lab. Hitachi Ltd.

• Miyazaki Masaru

  Central Research Laboratory Hitachi Ltd.

• Miyazaki Masaru

  Science & Technical Research Laboratories Nhk (japan Broadcasting Corporation)

• Takahama Mitsuharu

  Central Research Laboratory Hitachi Ltd.

• Umemoto Y

  Central Research Laboratory Hitachi Ltd.

• Umemoto Yasunari

  Central Research Laboratory Hitachi Ltd.

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