薄膜磁気記録媒体における諸特性の極薄Cr基シード層組成依存性 : Cr基シード層の成長様式及び融点・酸素親和性と媒体の微細構造との関係(磁気記録媒体)

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To reduce the grain size and media noise in a typical CoCrPtB/CrMo longitudinal medium, Cr_<85>Ti_<15> and W_xCr_<100-x> (X = 0, 25, 50, 75, 100) seedlayers were introduced and exposed to oxygen. The purpose of using a Cr-based seedlayer is to introduce a nucleation site for CrMo grains, and the purpose of exposing the seedlayer to oxygen is to enhance the nucleation site. The main results were as follows : (1) Results of AES and RHEED analysis suggest that a W_<100> seedlayer, which has a very high melting point, forms a layer-like film with very small and dense island grains, due to its high free surface energy and low mobility. On the other hand, W_<50>Cr_<50> and Cr_<100> seedlayers, which have lower melting points than the W_<100> seedlayer, form island film. (2) The media grain size and the media noise are reduced by the use of W_xCr_<100-x> (X = 0, 25, 50) seedlayers, which form island film and have higher melting points than the CrMo underlayer. (3) The media grain size and the media noise are further reduced by exposure of the seedlayer to oxygen when CrTi_<15> or W_xCr_<100-x> (X = 50, 75) seedlayers, which form island film and have a strong affinity for oxygen, are used. (4) To effectively reduce the media grain size and improve the media signal-to-noise ratio by exposing the seedlayer to oxygen, it is essential to utilize a very thin Cr-based seedlayer with a high melting point and a strong affinity for oxygen and which forms an island-like film, such as a W_<50>Cr_<50> seedlayer.
2003-04-01

薄膜磁気記録媒体における諸特性の極薄Cr基シード層組成依存性 : Cr基シード層の成長様式及び融点・酸素親和性と媒体の微細構造との関係(磁気記録媒体)

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