パターン付半導体ウエハ表面の回転塗布膜の乾燥収縮過程の流動形状解析

概要

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It is important that SiO_2 isolation film around aluminum connection lines has a flat surface in order to realize high-density devices. In this study, the transient change in liquid-SOG (spin-on-glass) film thickness distribution on a two-dimensional micro-grooved substrate during shrinkage was analyzed. Surface tension flow of the film was calculated. As the film was thin, boundary layer approximation was applied, and fourth-order equations of the film thickness were solved by an iteration method. The viscosity and the shrinkage rate were assumed to be functions of the concentration of the solvent in the film. When the value of [(surface tension)/{(shrinking speed)/(viscosity)}] is large and the width of projections is small, final surface undulations of the film are small. The effect of centrifugal force was also analyzed.
社団法人日本機械学会の論文
1996-09-25