YAGレーザーデポジションによるPZT薄膜合成過程におけるバルクターゲット-薄膜間の組成変動の評価

概要

論文の詳細を見る
In the process starting from fabrication of sintered PZT bulk target to its thin-film synthesis on Pt/Ti/SiO_2/Si substrates by pulsed laser deposition technique, the precise composition analysis has been carried out by X-ray fluorescence (XRF) measurement. The coexistent elemental effect was calibrated by a multiple regression analysis of normalized PZT specimens. As a result, an excellent XRF table for precise quantitative analysis of PZT system in the vicinity of the morphotropic phase boundary (MPB) around Zr/Ti=53/47 was prepared. X-ray diffraction (XRD) and its modeling calculation supported XRF results and evaluated Pb stoichiometry in the perovskite structure during sintering process of PZT bulk ceramics. Undre the variation of the partial oxygen pressure from 1 to 10 Pa in the PLD conditions, 5 Pa was the most suitable for PZT film growth highly oriented to perovskite (111) direction, and the composition deviation between bulk target and thin film was also investigated. Further effects of target degradation by laser-beam irradiation on the film stoichiometry and crystallinity were discussed.
社団法人日本セラミックス協会の論文
2001-02-01