22-1 超小型シリコンマイクロホンの高域特性の改善(第22部門イメージセンサI)

概要

論文の詳細を見る
Toward an ultra-small high-performance microphone for the next generation, we are studying a silicon microphone. In recent research, we developed a frequency response tuning technique by optimally designing the structure of a microphone capsule. By using this technique high-frequency response can be tuned up without any drop in sensitivity.
2005-08-01