13-9 放送用超小型シリコンマイクロホンの開発(第13部門情報センシング)

概要

論文の詳細を見る
Toward an ultra-small high-performance microphone for the next generation, we are studying a condenser silicon microphone. In recent research, we developed a novel dicing technique by which small microphone capsules can be cut out from a silicon wafer in good yield. By using this technique we fabricated a prototype microphone with high sensitivity and a wide frequency range for use in broadcasting.
2004-08-02