1A1-B12 大発生力・大発生変位を実現する圧電素子駆動の精密位置決め用アクチュエータの開発(アクチュエータの機構と制御)

概要

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An ultra precision positioning actuator with large force and long stroke has been proposed. This actuator is driven by piezoelectric(PZT) actuators. In order to design the actuator which utilizes the large force of PZT actuator, it is necessary to design the actuator which has high stiffness. But there are many factors which decrease this stiffness, such as manufacturing error, contact deformation, clearance between its output link and clamp, individual difference of PZT actuator's length. Then, mechanisms which adjust these factors and an actuator with these mechanisms have been proposed. Besides, driving method which increases output force by increasing the number of driving PZT actuators at the same time has been proposed. Basic characteristics of the proposed actuator and driving methods have been experimentally investigated.
一般社団法人日本機械学会の論文
2008-06-06