2512 高感度ひずみセンサによるひずみモニタリング(J10-3 計測・モニタリング・解析(3),J10 知的材料・構造システム)

概要

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A low power strain sensor chip, which contains a strain sensitive device and an amplifier circuit on single-crystalline silicon, was developed using the semiconductor fabrication process. The piezoresistance effect was adopted to measure strain change, and a Wheatstone bridge circuit, which consists of piezoresistors along the <110> directions, was formed on the silicon chip to detect the strain. The amplifier circuit has special functions, such as magnification change and zero adjustment functions from the exterior of the chip for optimizing the strain measuring operation. The experimental results showed that the sensor chip had outstanding features, which are high strain sensitivity (gage factor 4800), low power consumption (2.3mW). Considering these features, the sensor chip is ideal for strain monitoring system of mechanical materials.
社団法人日本機械学会の論文
2007-09-07