1310 半導体ひずみセンサを応用したピン型ロードセルの開発(J14-2 知的材料・構造システム(2) 計測・モニタリングI,ジョイントセッション,21世紀地球環境革命の機械工学:人・マイクロナノ・エネルギー・環境)

概要

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A pin-type load cell with a high-sensitivity semiconductor strain sensor for accurately measuring the load on a machine was developed. To detect shear strain in the pin, two strain sensors were bonded inside it Diffusion layers arranged at 45° to the load direction improve sensitivity to the strain field generated in the pin because they are sensitive in both the longitudinal and perpendicular directions. Performance testing indicated that this pin-type load cell has high linearity and small drift: the nonlinearity was 0.9%, the hysteresis was 1.2%, and the drift of the sensor output was 0.3%.
2008-08-02