3206 半導体ひずみセンサによる回転体のひずみモニタリング(J06-2 計測・モニタリングI,J06 知的材料・構造システム)

概要

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Strain sensor chip containing both sensors for measuring normal strain and for shear strain was developed. The sensor for measuring normal strain consists of p-type impurity diffusion layers located on the surface of the silicon substrate with longitudinal direction in <110>. The sensor for measuring shear strain was formed by n-type diffusion layers and has its longitudinal direction in <100>. This sensor chip was connected with a low power wireless module (IEEE802.15.4 standard). This wireless strain sensor was attached to a rotating axis, and the torque of the axis was measured. The measured data were compared with those of torque-measurement devices on the market. The result proves that the wireless sensing system measures precisely.
社団法人日本機械学会の論文
2006-09-15