Atomic Force Microscopy for High Aspect Ratio Structure Metrology
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-06-30
著者
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Morimoto Takafumi
Hitachi Kenki Fine Tech Co. Ltd.
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Hosaka Sumio
Department Of Production Science Technology Graduate School Of Engineering Gunma University
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Hosaka Sumio
Advanced Research Laboratory Hitachi Ltd.
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Hosaka Sumio
Department Of Nano Material System Graduate School Of Engineering Gunma University
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KEMBO Yukio
Hitachi Kenki Fine Tech, Co. Ltd.
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KURODA Hiroshi
Hitachi Kenki Fine Tech, Co., Ltd.
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MINOMOTO Yasushi
Hitachi Kenki Fine Tech, Co., Ltd.
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NAGANO Yoshiyuki
Hitachi Kenki Fine Tech, Co., Ltd.
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Kembo Yukio
Hitachi Kenki Fine Tech Co. Ltd.
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Minomoto Yasushi
Hitachi Kenki Fine Tech Co. Ltd.
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Nagano Yoshiyuki
Hitachi Kenki Fine Tech Co. Ltd.
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Morimoto Takashi
Hitachi Kenki Fine Tech Co. Ltd.
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Hosaka Sumio
Department Of Electronic Engineering Gunma University
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Kuroda Hiroshi
Hitachi Kenki Fine Tech Co. Ltd.
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Morimoto Takafmi
Hitachi Kenki Fine Tech, Co., Ltd.
関連論文
- Extremely Small Proximity Effect in 30keV Electron Beam Drawing with Thin Calixarene Resist for 20 x 20nm^2 Pitch Dot Arrays
- Ultra Low Operation Current Lateral Phase-Change Memory
- A Novel Lateral Phase-Change Random Access Memory Characterized by Ultra Low RESET Current and Power Consumption
- Memory Effect in Metal-Chalcogenide-Metal Structures for Ultrahigh-Density Nonvolatile Memories
- Finite Element Analysis of Dependence of Programming Characteristics of Phase-Change Memory on Material Properties of Chalcogenides
- Simulation of Proposed Confined-Chalcogenide Phase-Change Random Access Memory for Low Reset Current by Finite Element Modelling
- Annealing effect of phase change and current control in phase change channel transistor memory
- Dependences of Electrical Properties of Thin GeSbTe and AgInSbTe Films on Annealing
- Photo-Current Multiplication Phenomenon of Amorphous Silicon-Based Multilayer Photodiodes Fabricated on Crystalline Silicon Substrate : Semiconductors
- In-line Optical Lever System for Ultrasmall Cantilever Displacement Detection
- Nanometer Recording on Graphite and Si Substrate Using an Atomic Force Microscope in Air
- A Magnetic Force Microscope Using an Optical Lever Sensor and Its Application to Longitudinal Recording Media
- Highly Precise Atomic Force Microscope Measurement of High-Aspect Nanostructure Free of Probe Bending Error
- Atomic Force Microscopy for High Aspect Ratio Structure Metrology
- Phase Controlled Scanning Force Microscope
- High Resolution of Magnetic Force Microscope Image using a Just-on-Surface Magnetic Force Microscope
- Study of Magnetic Stray Field Measurement on Surface Using New Force Microscope
- Simultaneous Observation of 3-Dimensional Magnetic Stray Field and Surface Structure Using New Force Microscope
- Control of Aperture Size of Optical Probes for Scanning Near-Field OpticalMicroscopy Using Focused Ion Beam Technology
- Narrow Pitch Tracking Using Optical Head for Recording with Atomic Force Microscopy
- Ultrahigh Vacuum Non-Contact Atomic Force Microscope Observation of Reconstructed Si(110) Surface
- Prototype of Atomic Force Cantilevered SNOM Based on Though-The-Lens-Type Optical Lever and Polarized Illumination and Detection System
- Critical-Dimension Measurement using Multi-Angle-Scanning Method in Atomic Force Microscope
- Side-Wall Measurement using Tilt-Scanning Method in Atomic Force Microscope
- Terabits Patterning : Electron beam drawing with a bit pitch and track pitch of 25nm
- Terabits Patterning : Electron beam drawing with a bit pitch and track pitch of 25nm
- Terabits Patterning : Electron beam drawing with a bit pitch and track pitch of 25nm(Patterned media & MRAM,The 8th Asian Symposium on Information Storage Technology (ASIST-8))
- Fine Particle Inspection Down to 38 nm on Bare Wafer with Micro Roughness by Side-Scattering Light Detection
- Picogram Mass Sensor Using Resonance Frequency Shift of Cantilever
- Picogram Mass Sensor Using Piezoresistive Cantilever for Biosensor
- A Cavity-SNOM (Scanning Near-field Optical Microscopy) Head Using a Laser Diode
- Thermal Simulation Analysis of Scanning Near-Field Optical Microscope Point Heating Mechanisms
- Nanometer-Sized Phase-Change Recording Using a Scanning Near-Field Optical Microscope with a Laser Diode
- Field Evaporation of Metal Atoms onto Insulator/Conducting Substrate Using Atomic Force Microscope
- Far-Field and Near-Field Optical Readings of under-50nm-Sized Pits : Optics and Quantum Electronics
- Switching Property of Atomic Switch Controlled by Solid Electrochemical Reaction
- Simulation of Proposed Confined-Chalcogenide Phase-Change Random Access Memory for Low Reset Current by Finite Element Modelling
- A Novel Lateral Phase-Change Random Access Memory Characterized by Ultra Low Reset Current and Power Consumption
- Fabrication of 10-nm-order block copolymer self-assembled nanodots for high-density magnetic recording (Special issue: Microprocesses and nanotechnology)
- Multilevel Storage in N-Doped Sb2Te3-Based Lateral Phase Change Memory with an Additional Top TiN Layer
- Finite Element Analysis of Dependence of Programming Characteristics of Phase-Change Memory on Material Properties of Chalcogenides
- Femtogram Mass Biosensor Using Self-Sensing Cantilever for Allergy Check
- Side-Wall Measurement using Tilt-Scanning Method in Atomic Force Microscope
- Highly Precise Atomic Force Microscope Measurement of High-Aspect Nanostructure Free of Probe Bending Error
- Prototype of Atomic Force Cantilevered SNOM Based on Through-The-Lens-Type Optical Lever and Polarized Illumination and Detection System
- Picogram Mass Sensor Using Piezoresistive Cantilever for Biosensor
- Narrow Pitch Tracking Using Optical Head for Recording with Atomic Force Microscopy
- Dependences of Electrical Properties of Thin GeSbTe and AgInSbTe Films on Annealing
- Critical-Dimension Measurement using Multi-Angle-Scanning Method in Atomic Force Microscope
- Memory Effect in Metal–Chalcogenide–Metal Structures for Ultrahigh-Density Nonvolatile Memories
- Electrical Properties of Phase Change and Channel Current Control in Ultrathin Phase-Change Channel Transistor Memory by Annealing
- Height Measurement Using High-Precision Atomic Force Microscope Scanner Combined with Laser Interferometers
- Spectroscopic Ellipsometry Measurements for Liquid and Solid InSb around Its Melting Point
- Estimation of Three-Dimensional Atomic Force Microscope Tip Shape from Atomic Force Microscope Image for Accurate Measurement
- Picogram Mass Sensor Using Resonance Frequency Shift of Cantilever