Terabits Patterning : Electron beam drawing with a bit pitch and track pitch of 25nm
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概要
- 論文の詳細を見る
- 2006-11-02
著者
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Sone Hayato
Department Of Production Science Technology Graduate School Of Engineering Gunma University
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Hosaka Sumio
Department Of Production Science Technology Graduate School Of Engineering Gunma University
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HOSAKA Sumio
Graduate school of Engineering, Gunma University
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SANO Hirotaka
Graduate school of Engineering, Gunma University
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SONE Hayato
Graduate school of Engineering, Gunma University
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Sone Hayato
Graduate School Of Engineering Gunma University
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