Extremely Small Proximity Effect in 30keV Electron Beam Drawing with Thin Calixarene Resist for 20 x 20nm^2 Pitch Dot Arrays
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概要
- 論文の詳細を見る
- Japan Society of Applied Physicsの論文
- 2008-02-25
著者
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Mohamad Zulfakri
Department Of Nano Material Systems Graduate School Of Engineering Gunma University
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Sone Hayato
Department Of Production Science Technology Graduate School Of Engineering Gunma University
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Sone Hayato
Department Of Applied Physics The Science University Of Tokyo
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Hosaka Sumio
Department Of Production Science Technology Graduate School Of Engineering Gunma University
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Yin You
Department Of Production Science Technology Graduate School Of Engineering Gunma University
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SHIRA Masumi
Department of Nano Material Systems, Graduate School of Engineering, Gunma University
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SANO Hirotaka
Department of Nano Material Systems, Graduate School of Engineering, Gunma University
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MIYACHI Akihira
Advanced Technology Research Center (ATEC), Gunma University
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Shira Masumi
Department Of Nano Material Systems Graduate School Of Engineering Gunma University
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Miyachi Akihira
Advanced Technology Research Center (atec) Gunma University
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Hosaka Sumio
Department Of Electronic Engineering Gunma University
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YIN You
Department of Nano-material Systems, Graduate School of Engineering, Gunma University
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