Picogram Mass Sensor Using Resonance Frequency Shift of Cantilever
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概要
- 論文の詳細を見る
A microsensor with a picogram mass sensitivity has been researched using the resonance frequency shift of an atomic force microscope (AFM) cantilever. The mass change of the water molecules adsorbed on the cantilever was measured by analyzing the resonance frequency shift using a laser beam deflection detection system. As experimental results, a sensitivity of about 2 pg/Hz was obtained. The mass change due to increasing humidity showed that the mechanism of water molecular growth changed from an island growth to a layer growth. The critical point of the mechanism change was a humidity of about 60%. The adsorbed mass corresponds to a water layer of about 12 monolayers.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-06-15
著者
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Sone Hayato
Department Of Applied Physics The Science University Of Tokyo
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FUJINUMA Yoshinori
Department of Nano-Material Systems, Gunma University
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Hosaka Sumio
Department Of Electronic Engineering Gunma University
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Fujinuma Yoshinori
Department of Nano-Material Systems, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan
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