Estimation of Three-Dimensional Atomic Force Microscope Tip Shape from Atomic Force Microscope Image for Accurate Measurement
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概要
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We studied methods of estimating three-dimensional (3-D) tip structure using impulse response technique. We have proposed a 3-D tip estimation method using an infinite small diameter standard column as the impulse response technique. The standard column has been made by image processing of a finite-small-diameter-column standard sample by a software elimination technique. We demonstrated how to obtain the 3-D atomic force microscope (AFM) pyramidal tip shape using a commercial pyramidal tip and a 665-nm-diameter-column sample. The estimated tip radii are 10–15 nm in various profiles of the top. The results indicate that the method is effective to estimate a 3-D AFM tip structure in order to obtain an accurate AFM image.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-07-25
著者
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Sone Hayato
Department Of Applied Physics The Science University Of Tokyo
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Hosaka Sumio
Department Of Electronic Engineering Gunma University
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Hosaka Sumio
Department of Production Science and Technology, Graduate School of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan
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Harada Yasuhiko
Department of Production Science and Technology, Graduate School of Engineering, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan
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