Growth Kinetics of Silicon Carbide Chemical Vapor Deposition from Methyltrichlorosilane
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-04-15
著者
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Sone Hayato
Department Of Production Science Technology Graduate School Of Engineering Gunma University
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Sone Hayato
Department Of Applied Physics The Science University Of Tokyo
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KANEKO Tsutomu
Department of Applied Physics,Faculty of Science,Science University of Tokyo
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Miyakawa Nobuaki
Department of Applied Physics, Science University of Tokyo
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NAKA Mitihiro
Department of Applied Physics, The Science University of Tokyo
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Naka Mitihiro
Department Of Applied Physics The Science University Of Tokyo
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Miyakawa Nobuaki
Department Of Applied Physics The Science University Of Tokyo
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Kaneko Tsutomu
Department Of Applied Physics The Science University Of Tokyo
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Kaneko Tsutomu
Department Of Applied Physics Faculty Of Science Science University Of Tokyo
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