Far-Field and Near-Field Optical Readings of under-50nm-Sized Pits : Optics and Quantum Electronics

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概要

• 論文の詳細を見る

• In this study, we investigated the limitations of optical reading of very fine pits using conventional optics, immersion lens optics and near-field optics. Using very fine pits < 100 nm in size formed by electron beam writing, a reflection-type depolarization scanning near-field optical microscope (SNOM) read very fine pits <50nm in size. On the other hand, far-field optics read fine pits only> 160nm in size using a lens with a numerical aperture (NA) of 0.95 (17Gb/in^2). In addition, an oil immersion lens optics with a NA of 1.4 read fine pits only 100 nm in size (45Gb/in^2). Advanced near-field optics is a promising tool for achieving ultrahigh-density optical reading of trillion bits/in^2.

• 社団法人応用物理学会の論文
• 2002-08-01

著者

• Hosaka Sumio

  Department Of Production Science Technology Graduate School Of Engineering Gunma University

• Hosaka Sumio

  Department Of Electronic Engineering Gunma University:central Research Laboratory Hitachi Ltd.

• SHINTANI Toshimichi

  Central Research Laboratory, Hitachi, Ltd.

• Nishida Tetsuya

  Central Research Laboratory Hitachi Ltd.

• Nishida Tetsuya

  Central Resarch Laboratory Hitachi Ltd.

• SAIKI Toshiharu

  Kanagawa Academy of Science and Technology

• KOYANAGI Hajime

  Central Research Laboratory, Hitachi Ltd.

• Koyanagi Hajime

  Central Research Laboratory Hitachi Ltd.

• Koyanagi Hajime

  Central Research Lab. Hitachi Ltd.

• Shintani Toshimichi

  Central Research Laboratory Hitachi Ltd.

• Hosaka Sumio

  Department Of Electronic Engineering Gunma University

• KATOH Keizo

  Central Research Laboratory, Hitachi, Ltd.

• HASAGAWA Tsuyoshi

  RIKEN

• Katoh Keizo

  Central Research Laboratory Hitachi Ltd.

• Saiki Toshiharu

  Kanagawa Academy Of Science Technology

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