Characterization of GaAs Surfaces Treated with Remote PH_3 Plasma
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-03-15
著者
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Sugino T
Osaka Univ. Osaka Jpn
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Matsuda Kazuko
Faculty Of Engineering Kanazawa University
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Matsuda K
Univ. Cambridge Cambridge Gbr
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Matsuda K
Waseda Univ. Tokyo Jpn
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NOZU Satoshi
Department of Electrical Engineering, Osaka University
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MATSUDA Koichiro
Horiba, Ltd.
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SUGINO Takashi
Department of Electrical Engineering, Osaka University
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Nozu Satoshi
Department Of Electrical Engineering Osaka University
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Sugino Takashi
Department Of Electrical Engineering. Osaha University
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Sugino T
Department Of Electrical Engineering. Osaha University
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Sugino Takashi
Department Of Basic Pathology Fukushima Medical University
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