Evidence for Phosphorus Passivation of Plasma-Induced Damage at GaAs Surface Probed by EL2 Traps

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-09-20

著者

• Yamada Takashi

  Department of Molecular Biotechnology, Graduate School of Advanced Sciences of Matter, Hiroshima Uni

• Yamada T

  Tokyo Inst. Of Technol. Tokyo Jpn

• Yamada T

  Tokyo Inst. Technol. Tokyo Jpn

• Sugino T

  Osaka Univ. Osaka Jpn

• Yamada T

  Daido Inst. Technol. Nagoya Jpn

• Yamada T

  Sophia Univ. Tokyo Jpn

• SHIRAFUJI Junji

  Department of Electrical Engineering, Faculty of Engineering, Osaka University

• Matsuda Kazuko

  Faculty Of Engineering Kanazawa University

• Yamada T

  Tokai Univ. Hiratsuka Jpn

• Matsuda K

  Univ. Cambridge Cambridge Gbr

• Yamada Takashi

  Department Of Chemistry Faculty Of Science And Engineering Konan University

• Matsuda K

  Waseda Univ. Tokyo Jpn

• MATSUDA Koichiro

  Horiba, Ltd.

• SUGINO Takashi

  Department of Electrical Engineering, Osaka University

• Sugino T

  Department Of Electrical Engineering. Osaha University

• Shirafuji J

  Fukui Univ. Technol.

• Shirafuji Junji

  Department Of Electrical And Electronic Engineering

• Sugino Takashi

  Department Of Basic Pathology Fukushima Medical University

• Yamada Takashi

  Department Of Animal Science Graduate School Of Agricultural Science Kobe University

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