Effect of Angular Distribution of Ejected Atoms from a Target on the Uniformity of Thickness and Composition of MoSi_x Sputtering Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-07-20
著者
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MATSUDA Kenji
Faculty of Pharmaceutical Sciences, Nagoya City University
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Yamazaki Toshinari
Faculty Of Engineering Toyama University
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Matsuda K
Waseda Univ. Tokyo Jpn
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NAKATANI Hideo
Faculty of Engineering, Toyama University
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Nakatani Hideo
Faculty Of Engineering Toyama University
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Matsuda Kenji
Faculty Of Engineering Kyushu Institute Of Technology
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