Formation of InP Metal-Insulator-Semiconductor Schottky Junctions by UV Laser-Induced Photolytic Process of Phosphine Gas
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概要
- 論文の詳細を見る
It is shown by Auger electron spectroscopy analysis that the ArF excimer laser photolytic process of phosphine (PH_3) gas is capable of removing native oxide and simultaneously depositing amorphous P film on an InP surface. The barrier height of Au-InP Schottky junctions with a thin P layer is found to increase to 0.73 eV from 0.48 eV in the case of untreated Schottky diodes. An enhancement of the barrier height is attributed to a metal-insulator-semiconductor (MIS) Schottky structure. In addition, it is demonstrated that the present procedure is suitable for hydrogenation of InP surfaces without surface degradation due to P dissociation.
- 社団法人応用物理学会の論文
- 1990-10-20
著者
-
Ito Hiroyuki
Department Of Internal Medicine Division Of Cardiovascular And Respiratory Medicine Akita University
-
SHIRAFUJI Junji
Department of Electrical Engineering, Faculty of Engineering, Osaka University
-
SUGINO Takashi
Department of Electrical Engineering, Osaka University
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Shirafuji Junji
Department Of Electrical And Electronic Engineering
-
Sugino Takashi
Department Of Basic Pathology Fukushima Medical University
-
Ito Hiroyuki
Department Of Anesthesiology Tokyo Medical And Dental University Graduate School Of Medical And Dent
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Ito Hiroyuki
Department Of Electrical Engineering Faculty Of Engineering Osaka University
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