YBaCuO Thin-Film Growth on Electrooptic LiNbO_3 Substrate with Buffer Layer

概要

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Oxide superconducting YBaCuO thin films were grown on Y-and Z-cut LiNbO_3 (LN) electrooptic crystal substrates with and without buffer layers, and their film crystallinity was closely investigated by X-ray diffraction, transmission electron microscopy, reflection high-energy electron diffraction and Auger electron spectroscopy. Due to the intensive reaction, direct deposition of films resulted in poor quality. When sputtered (111)-MgO film was introduced as a buffer layer, significant diffusion of constituent atoms was unavoidable among YBaCuO, MgO and LN. As a result, the superconductivity of the YBaCuO layer was substantially degraded. The Y_2O_3-stabilized ZrO_2 (YSZ) grown by sputtering, followed by wet O_2 anneal, served as a good buffer layer for Y_1Ba_2Cu_3O_y films on LN substrates, and epitaxial growth of (001)Y_1Ba_2Cu_3O_y with T_<co>=89 K was reproducibly obtained on Y-cut LN substrates.
社団法人応用物理学会の論文
1992-03-15