Effect of Nonstoichiometry on Dielectric Properties of Strontium Titanate Thin Films Grown by ArF Excimer Laser Ablation
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概要
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Dielectric properties and lattice parameters of nonstoichiometric strontium titanate were systematically investigated. The X-ray diffraction measurements indicated the formation of SrO・(SrTiO_3)_n(n=4-53) instead of SrTiO_3 with excess Sr. Epitaxial films grown on (111)Pt/(100)MgO by an ArF excimer laser ablation method were mostly orientated along the (10<2n+1>__-) axis. With decrease in the frequency of Sr-O plane sliding-in (increasing n value), the dielectric constant ε increased from 87ε_0 to 300ε_0. Furthermore, an improved property was also obtained in its temperature dependence. The sublattice (perovskite SrTiO_3) in the vicinity of sliding-in Sr-O plane was slightly distorted (compressed by about 15%).
- 社団法人応用物理学会の論文
- 1993-12-01
著者
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KOBAYASHI Takeshi
Faculty of Engineering Science, Osaka University
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Taga Masahiro
Faculty Of Engineering Science Osaka University
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HIRANO Takashi
Faculty of Pharmaceutical Sciences, Tokushima Bunri University
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Hirano Takashi
Faculty Of Engineering Science Osaka University
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Kobayashi Takeshi
Faculty Of Engineering Science Department Of Electrical Engineering Osaka University
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