Depth Profile Measurement of Activated Boron-Concentration in Diamond Thin Films Utilizing Schottky Diode C-V Curves
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-11-01
著者
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Maki Tetsuro
Department Of Physical Science Graduate School Of Engineering Science Osaka University:core Research
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Maki Tetsuro
Graduate School Of Engineering Science Osaka University
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SHIKAMA Shozo
Faculty of Engineering Science, Osaka University
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MAKI Tetsuro
Faculty of Engineering Science, Osaka University
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KOBAYASHI Takeshi
Faculty of Engineering Science, Osaka University
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Shikama S
Faculty Of Engineering Science Osaka University
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HOU Gen
Faculty of Engineering Science, Osaka University
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Maki T
Osaka Univ. Osaka Jpn
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Hou Gen
Faculty Of Engineering Science Osaka University
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Shikama Shozo
Faculty Of Engineering Science Osaka University
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Kobayashi Takeshi
Faculty Of Engineering Science Department Of Electrical Engineering Osaka University
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