Diamond-Like Carbon Film Deposition by Super-Wide Electron-Cyclotron Resonance Plasma Source Excited by Traveling Microwave
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-06-01
著者
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KOBAYASHI Takeshi
Faculty of Engineering Science, Osaka University
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SAKAGUCHI Yoshiyuki
Faculty of Engineering Science, Osaka University
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SUGIYO Masato
Power Source Technology Department, Advanced Component Division, Daihen Corporation
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Sugiyo Masato
Power Source Technology Department Advanced Component Division Daihen Corporation
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ISHII Akira
DAIHEN Corporation
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MINOMO Shoichiro
DAIHEN Corporation
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TANIGUCHI Michio
DAIHEN Corporation
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SUGIYO Masato
DAIHEN Corporation
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Sakaguchi Yoshiyuki
Faculty Of Engineering Science Osaka University
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Kobayashi Takeshi
Faculty Of Engineering Science Department Of Electrical Engineering Osaka University
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