One-Shot Exeimer Laser Laminar Annealing of SrTiO_3 Thin Films in Solidus Phase

概要

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By virtue of high optical absorptance and low thermal conductivity of SrTiO_3, and short duration of the laser pulse, one-shot ArF excimer laser irradiation exerted an efficient annealing effect on the top SrTiO_3 thin layer in the SrTiO_3/YBa_2Cu_3O_y/MgO heterostructure without causing interfacial deterioration. Namely, our new method is characterized by laminar annealing of nanosecond duration. Actually, by one-shot laser irradiation, the permittivity of the top SrTiO_3 film (110 nm thick) was improved from 52ε_0 (as grown) to 220ε_0. Annealing strongly depended on the laser energy but not on the pulse number. When the laser energy was increased up to 150 mJ/cm^2, at which the top surface of the underlying YBa_2Cu_3O_y reached its molten phase, the SrTiO_3 permittivity degraded markedly.
社団法人応用物理学会の論文
1994-11-01