Effects of Oxygen Added to Reagent Gas on Chemical Vapor Deposition of Diamond Thin Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-03-15
著者
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KOBAYASHI Takeshi
Faculty of Engineering Science, Osaka University
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Kim Tae-hyun
Faculty Of Engineering Science Osaka University
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Kobayashi Takeshi
Faculty Of Engineering Science Department Of Electrical Engineering Osaka University
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