3245 アクティブバルブを用いた共振駆動形圧電マイクロポンプ

概要

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In this paper, to obtain further performance of the resonantly-driven piezoelectric micropump developed as a micro fluid power source applicable to microfactory or micromachines using fluid power, a novel check valve that actively controls valve open/close motion using piezoelectric actuator is proposed and static characteristics between flow rates across the developed check valve and applied pressures are investigated. Employing the active-type check valve instead of conventional passive-type is expected to realize some advantages such as an increased valve-opening area and response, a low damping ratio and a bi-directional flow using an adequate timing control for closing motion. A prototype micropump using two active-type check valves for inlet and outlet is fabricated with the effective size of 17×18×11(mm)^3. Through experiments on frequency characteristics of flow rate without load pressure, the validity of the proposed active-type check valves is verified.
社団法人日本機械学会の論文
2002-09-20