127 均一系ER流体を作動流体としたポンプ搭載形管内走行マイクロマシン

概要

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As an advanced control component and a fluid power source for practical and powerful micromachines using fluid power, the authors have proposed and developed a micro ER valve using homogeneous ER fluids and a resonantly-driven piezoelectric micropump, respectively. In this paper, the above elements-mounted in-pipe mobile micromachine is developed. Firstly, to select the most suitable homogeneous ER fluids for micromachines, basic characteristics of some kinds of liquid crystals are experimentally investigated with 2-port micro ER valves fabricated by micromachining. Secondly, output characteristics of the resonantly-driven piezoelectric micropump are investigated with some improvements for pumping the selected homogeneous ER fluids. Finally, through investigations on supporting and propelling mechanisms, an in-pipe mobile micromachine mounted with the above microvalve and micropump is fabricated with 9mm in diameter and 75mm in length and experiment for an inchworm type travelling is attempted.
社団法人日本機械学会の論文
2001-03-30