2314 高出力極薄平面形ECFポンプの開発および特性評価(OS8-3 アクチュエータシステム(3))

概要

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A high performance ultra thin-planar pump using electro-conjugate fluid (ECF) was developed and tested. The pump consists of a pump base, a top cover, and an electrode substrate. The overall dimensions of the fabricated ultra thin-planar ECF pump are 120mm×38mm×13mm and the flow channel height is 500μm. The ECF is a kind of dielectric and functional fluids, which generates a powerful jet flow (ECF-jet) by an applied static electric field through a pair of electrodes. The ECF-jet directly acts on the working fluids, thus, the ultra thin-planar ECF pump needs no moving parts and produces no vibration and noise. Various arrays of the electrodes, such as rectangular, saw-tooth, and arc-shape electrodes, were investigated for realization of a high performance ultra thin-planar ECF pump. The pumping experiments of the fabricated pump were performed with five different electrode patterns using FF-1_<EHA2> as the working fluid. Through experimental results, the no-load flow rate of 940mm^3/s, maximum output pressure of 11.6kPa, and maximum output power of 3.1mW were achieved at an applied voltage of 3.0kV.
一般社団法人日本機械学会の論文
2006-05-28