バイモルフ形PZT素子アレイを用いた薄形ぜん動管路形マイクロポンプ : 片面駆動形の試作(機械要素,潤滑,工作,生産管理など)

概要

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In this study, a novel peristaltic micro pump using bimorph type PZT elements is proposed. The pumping of liquid is realized by active and peristaltic motion of channel formed with metal film. The motion is controlled with controlling driving voltage of 5 bimorph-type PZT elements that are laid on the metal film. In this paper, the peristaltic micro pump (20 mm×20 mm×2 mm) is fabricated to verify the pumping principle and to examine the characteristics. Intermittent sinusoid driving method for PZT element is proposed to advance the pumping characteristics. The maximum output flow rate of 250 mm^3/min is obtained and the maximum load pressure of 3.1 kPa is obtained.
社団法人日本機械学会の論文
2002-02-25