2313 薄膜金属ガラスを用いた集積形ERマイクロアクチュエータ(OS8-3 アクチュエータシステム(3))

概要

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A novel 3-DOF ER micractuator using thin film metallic glass was proposed and fabricated. The actuator consists of 3-DOF stacked diaphragms and a micro ER valves unit. By internal stress elimination in the supercooled liquid region and wide elastic range of thin film metallic glass, the diaphagms have capability to generate large displacement. In this paper, as a simple diaphagm configulation for larger displacement, a double dome diaphragm was obtained based on FEM analysis. Through fabrications using MEMS process, process conditions to fabricate the double dome diaphragms were experimentally clarified. Also, the micro ER valves unit large model was fabricated and the valve control characteristics were experimentally clarified.
一般社団法人日本機械学会の論文
2006-05-28