319 均一系ER流体を用いたポンプ搭載形管内逆行マイクロマシン : バルブおよびポンプの実験的検討(流体工学III・流体機械)(オーガナイズドセッション(b)実地における流体諸問題)

概要

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To realize practical high power micromachines, the authors have proposed a simple microvalve using homogeneous ER fluids and are developing a micropump-mounted in-pipe mobile micromachine with 9mm in diameter. In this paper, firstly, 2-port micro ER valves are fabricated by micro machining and some kinds of homogeneous ER fluids' characteristics are experimentally investigated. Secondly, for higher output of the resonantly-driven piezoelectric micropump, the check valves are improved and the pump characteristics are experimentally investigated. Finally, the structure of an in-pipe mobile micromachine using above-mentioned elements is discussed.
社団法人日本機械学会の論文
2000-09-25