1011 半導体プロセスを用いたマイクロ ER バルブ : 3 ポートマイクロ ER バルブの試作と特性実験

概要

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As an advanced control component for realization of high power micromachines using fluid power in millimeter size, the authors have proposed a simple micro ER valve using homogeneous ER fluids and fabricated several micro ER valves by conventional machining. Besides, to control micro grippers mounted on micromachines, further miniaturized 2-port micro ER valves have been fabricated by micromachining using anisotropic etching, sputter and anodic bonding. In this study, a 3-port micro ER valve composed of two 2-port micro ER valves is fabricated. Each 2-port micro ER valve has electrode dimensions of 1.2mm in width, 5mm in length and 0.08mm in gap length. Firstly, the static and dynamic characteristics are experimentally investigated with the blocked control port. From the results, it is ascertained that the controllable pressure change rate is about 60% of supply pressure and the rise time is about 0.2s. Next, an application to position control of a bellows microactuator is performed. With supply pressure of 0.17MPa and electric field strength change of 4.0kV/mm, the output displacement of 0.09mm and the generation force of 0.47N are realized.
社団法人日本機械学会の論文
2000-07-31