Robust 3-Metallization BEOL Process for 0.18μm Embedded FRAM
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概要
- 論文の詳細を見る
- 2004-09-15
著者
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Kim H.
Advanced Technology Team 2 Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kim Kinam
Advanced Technology Development 2 Team Semiconductor R&d Center Memory Division Samsung Electron
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Kim K
Samsung Electronics Co. Ltd. Kyungki‐do Kor
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Kim Kinam
Advanced Technology Development 2 Memory Device Business Samsung Electronics Co.
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PARK J.
Advanced Technology Development, Semiconductor R&D Div., Samsung Electronics Co., Ltd
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Kim Kinam
Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kang S.
Advanced Technology Team 2 Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee S
Advanced Technology Team 2 Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Rhie H.
Advanced Technology Development Team Memory Division Semiconductor Business Samsung Electronics Co.
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Lee S.
Advanced Technology Development Samsung Electronics Co. Ltd
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Park J.
Advanced Technology Development Team I Memory Division Semiconductor Business Samsung Electronics Co
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Park J.
Advanced Technology Team 2 Semiconductor R&d Center Samsung Electronics Co. Ltd.
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KANG Y.
Advanced Technology Team 2, Semiconductor R&D center, Samsung Electronics Co. LTD.
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CHOI D.
Advanced Technology Team 2, Semiconductor R&D center, Samsung Electronics Co. LTD.
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Kim H.
Advanced Technology Development Team I Memory Division Semiconductor Business Samsung Electronics Co
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JOO H.
Advanced Technology Development 2 Team, Semiconductor R&D Center, Memory Division, Samsung Electroni
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KOO B.
Advanced Technology Development Team, Memory Division, Semiconductor Business, Samsung Electronics C
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Kim K.
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd
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Park J.
Advanced Technology Development 2 Team Semiconductor R&d Center Memory Division Samsung Electron
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Kang Y.
Advanced Technology Team 2 Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Lee S.
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd
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Joo H.
Advanced Technology Development 2 Team Semiconductor R&d Center Memory Division Samsung Electron
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Kim H.
Advanced Joining & Welding Research Team Kitech
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Kang Y.
Advanced Technology Development Team Semiconductor R&d Center Memory Division Samsung Electronic
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Choi D.
Advanced Technology Team 2 Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Kim H
Advanced Technology Team 2 Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Koo B.
Advanced Technology Development Team Memory Division Semiconductor Business Samsung Electronics Co. Ltd.
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