Highly Reliable Ring-Type Contact for High-Density Phase Change Memory
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概要
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An advanced bottom electrode contact (BEC) was successfully developed for reliable high-density 256 Mb phase-change random access memory (PRAM) using a ring-type contact scheme. This advanced ring-type BEC was prepared by depositing very thin TiN films inside a contact hole, after which core dielectrics were uniformly filled into the TiN-deposited contact hole. Using this novel contact scheme, it was possible to reduce reset current while maintaining a low set resistance and a uniform cell distribution. Thus, it has been clearly demonstrated that the use of the ring-type contact technology is very feasible for high-density PRAM beyond 256 Mb.
- 2006-04-30
著者
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Kim Kinam
Advanced Technology Development 2 Memory Device Business Samsung Electronics Co.
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JEONG Won-Cheol
Advanced Technology Development, Semiconductor R&D Centre, Samsung Electronics Co. Ltd.
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JEONG Gi-Tae
Advanced Technology Development, Semiconductor R&D Centre, Samsung Electronics Co. Ltd.
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Jeong Hong-sik
Advanced Technology Development Team Memory Division Semiconductor Business Samsung Electronics Co.
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Jeong Chang-wook
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Koh Gwan-hyeob
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Song Yoon-jong
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Hwang Young-nam
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Ahn Su-jin
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Lee Su-youn
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Yeung Fai
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Shin Jae-min
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Lee Se-ho
Advanced Technology Development Team Semiconductor R&d Center Samsung Electronics
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Lee Su-Youn
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Kim Jeong-In
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Oh Jae-Hee
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Oh Jae-Hee
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Ryoo Kyung-Chang
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Ryoo Kyung-Chang
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Park Jae-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Park Jae-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Park Jong-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Park Jong-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Yeung Fai
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Song Yoon-Jong
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Shin Jae-Min
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Jeong Chang-Wook
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Ahn Su-Jin
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Kim Jeong-In
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kim Jeong-In
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Koh Gwan-Hyeob
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Hwang Young-Nam
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Kim Kinam
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Jeong Hong-Sik
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Jeong Hong-Sik
Advanced Technology Development 2 Team, Semiconductor R&D Center, Memory Division, Samsung Electronics Co., Ltd., San 24, Nongseo-Dong, Kiheung-Gu, Yongin-Si, Kyungki-Do 446-711, Korea
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Jeong Won-Cheol
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Jeong Gi-Tae
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Jeong Gi-Tae
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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Lee Se-Ho
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San#24, Nongseo-Dong, Kiheung-Ku, Yongin-City, Kyunggi-Do, 449-711, Korea
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