Ring Contact Electrode Process for High Density Phase Change Random Access Memory
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概要
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It is very important to maintain stable cell uniformity for reliable operation and wide sensing margin since the writing current is mainly governed by the bottom electrode contact (BEC) size which is especially sensitive to small process variation. In order to accomplish low writing current with uniform cell distribution, advanced storage module technology using ring type BEC was proposed. Using this, it was possible to achieve flat and uniform BEC, which results in a wide sensing margin and high manufacturability. Finally, we firstly fabricated advanced ring type contact structure and firstly evaluated based on high density 256 Mbytes phase change random access memory (PRAM) with small cell size technologies.
- 2007-04-30
著者
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Kim Kinam
Advanced Technology Development 2 Memory Device Business Samsung Electronics Co.
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RYOO Kyung-Chang
Advanced Technology Development, Semiconductor R&D Centre, Samsung Electronics Co. Ltd.
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PARK Jae-Hyun
Advanced Technology Development, Semiconductor R&D Centre, Samsung Electronics Co. Ltd.
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JEONG Gi-Tae
Advanced Technology Development, Semiconductor R&D Centre, Samsung Electronics Co. Ltd.
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Jeong Hong-sik
Advanced Technology Development Team Memory Division Semiconductor Business Samsung Electronics Co.
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Jeong Chang-wook
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Shin Jae-min
Advanced Technology Development Semiconductor R&d Centre Samsung Electronics Co. Ltd.
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Lee Kwang-Woo
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Song Yoon
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Park Sang-Su
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Lim Dong-Won
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kim Jae-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Park Woon-Ik
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Sim Ku-Ri
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Jeong Ji-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kang Dae-Hwan
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kong Jun-Hyuck
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Oh Jae-Hee
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kim Jeong-In
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Oh Yong-Tae
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kim Ji-Sun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Eun Seong-Ho
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Koh Seong-Pil
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Fai Yung
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Koh Gwan-Hyob
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Fai Yung
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Sim Ku-Ri
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Oh Jae-Hee
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kim Ji-Sun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Oh Yong-Tae
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Eun Seong-Ho
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Lim Dong-Won
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Park Woon-Ik
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Koh Gwan-Hyob
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Park Sang-Su
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Ryoo Kyung-Chang
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Park Jae-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Koh Seong-Pil
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kang Dae-Hwan
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kong Jun-Hyuck
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Shin Jae-Min
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Jeong Chang-Wook
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kim Jeong-In
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kim Kinam
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Kim Jae-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Jeong Hong-Sik
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Jeong Hong-Sik
Advanced Technology Development 2 Team, Semiconductor R&D Center, Memory Division, Samsung Electronics Co., Ltd., San 24, Nongseo-Dong, Kiheung-Gu, Yongin-Si, Kyungki-Do 446-711, Korea
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Jeong Gi-Tae
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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Jeong Ji-Hyun
Advanced Technology Development Team, Semiconductor R&D Centre, Samsung Electronics Co., Ltd., San #24, Nongseo-Ri, Kiheung-Eup, Yongin-City, Kyunggi-Do 449-711, Korea
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