Light Emission Analysis of Dielectric Breakdown in Stressed Damascene Copper Interconnection

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-04-01

著者

• 武田 健一

  日立製作所 中央研究所

• Hinode Kenji

  Istec/srl

• Hinode Kenji

  Central Research Laboratory Hitachi Ltd.

• Hinode Kenji

  Central Research Laboratory Hitachi Lid.

• Takeda Ken-ichi

  Central Research Laboratory Hitachi Ltd.

• NOGUCHI Junji

  Device Development Center, Hitachi Ltd.

• YAMAGUCHI Hizuru

  Device Development Center, Hitachi Ltd.

• Noguchi Junji

  Device Development Center Hitachi Ltd.

• Yamaguchi Hizuru

  Device Development Center Hitachi Ltd.

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