Hinode Kenji | Central Research Laboratory Hitachi Lid.
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概要
関連著者
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Hinode Kenji
Central Research Laboratory Hitachi Lid.
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武田 健一
日立製作所 中央研究所
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Takeda Ken-ichi
Central Research Laboratory Hitachi Ltd.
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Hinode Kenji
Central Research Laboratory Hitachi Ltd.
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Takeda Ken'ichi
Central Research Laboratory Hitachi Ltd.
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Takeda Ken-ichi
Central Research Laboratory, Hitachi Ltd., Kokubunji-shi, Tokyo 185-8601, Japan
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Takeda Ken-ichi
Hitachi, Ltd., Central Research Laboratory, 1-280 Higashikoigakubo Kokubunji-shi, Tokyo 185-8601, Japan
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Takeda Ken-ichi
Hitachi, Ltd., Central Research Laboratory, Kokubunji, Tokyo 185-8601, Japan
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Takeda Ken-ichi
Central Research Laboratory, Hitachi Ltd., Higashikoigakubo, Kokubunji, Tokyo 185-8601, Japan
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Kondo Seiichi
Central Research Laboratory Hitachi Ltd.
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Noguchi Junji
Device Development Center Hitachi Ltd.
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Yamaguchi Hizuru
Device Development Center Hitachi Ltd.
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Hinode Kenji
Istec/srl
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NOGUCHI Junji
Device Development Center, Hitachi Ltd.
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YAMAGUCHI Hizuru
Device Development Center, Hitachi Ltd.
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Hanaoka Yuko
Central Research Laboratory Hitachi Ltd.
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Deguchi Osamu
Toho University Faculty Of Science
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TANIGAWA Shoichiro
Institute of Materials Science, The University of Tsukuba
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HINODE Kenji
Superconductivity Research Laboratory, International Superconductivity Technology Center
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Cho Y‐k
Univ. Tsukuba Ibaraki
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Cho Yang-koo
Institute Of Materials Science University Of Tsukuba:(present Address)korea Standards Institute
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Cho Yang-koo
Institute Of Materials Science University Of Tsukuba:(present Address)korea Research Institute)
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WEI Long
Institute of Materials Science, University of Tsukuba
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DOSHO Chisei
Institute of Materials Science, University of Tsukuba
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Wei L
Institute Of Materials Science University Of Tsukuba
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Hinode K
Hitachi Ltd. Tokyo Jpn
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Wei Long
Institute Of Materials Science University Of Tsukuba
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Dosho Chisei
Institute Of Materials Science University Of Tsukuba
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Tanigawa Shoichiro
Institute Of Applied Physics University Of Tsukuba
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Kobayashi Nobuyoshi
Semiconductor & Integrated Circuits Div. Hitachi Ltd.
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Kodama Daisuke
Central Research Laboratory Hitachi Ltd.
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YAMAGUCHI Hizuru
Renesas Technology Corp.
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Tanigawa S
Institute Of Applied Physics University Of Tsukuba
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HOMMA Yoshio
Central Research Laboratory, Hitachi, Ltd.
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HANAOKA Yuko
Central Research Laboratory, Hitachi, Ltd.
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Homma Y
Hitachi Ltd. Tokyo Jpn
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Homma Yoshio
Central Research Laboratory Hitachi Ltd.
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MIYAZAKI Hiroshi
Central Research Laboratory, Hitachi, Ltd.
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Miyazaki H
Osaka Univ. Osaka Jpn
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DEGUCHI Osamu
Toho University, Faculty of Science
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Miyazaki Hiroshi
Department Of Communication Engineering Faculty Of Computer Science And System Engineering Okayama P
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Yamaguchi Hizuru
Device Development Center, Hitachi Ltd., Ome-shi, Tokyo 198-8512, Japan
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Noguchi Junji
Device Development Center, Hitachi Ltd., Ome-shi, Tokyo 198-8512, Japan
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Kondo Seiichi
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185, Japan
著作論文
- Variable-Energy Positron Studies of Vacancy-Type Defects in TiN Films on Si
- Light Emission Analysis of Dielectric Breakdown in Stressed Damascene Copper Interconnection
- Dielectric Breakdown and Light Emission in Copper Damascene Structure under Bias-Temperature Stress
- Increase in Electrical Resistivity of Copper and Aluminum Fine Lines
- Time-Dependent Dielectric Breakdown of Interlevel Dielectrics for Copper Metallization
- Resistivity Increase In Ultrafine-Line Copper Conductor for ULSIs : Semiconductors
- Fast Electromigration-lifetime Prediction of Al-based Layered Metallization using the Similarity of Resistance Increase Curve
- Light Emission Analysis of Dielectric Breakdown in Stressed Damascene Copper Interconnection
- Fast Electromigration-lifetime Prediction of Al-based Layered Metallization using the Similarity of Resistance Increase Curve