Sub-100nm Lithography with Using Pulsed Plasma Graft-polymerized Styrene and E-Beam Excited Plasma
スポンサーリンク
概要
著者
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Yamada T
Tokyo Inst. Of Technol. Tokyo Jpn
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Yamada T
Tokyo Inst. Technol. Tokyo Jpn
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Yamada T
Daido Inst. Technol. Nagoya Jpn
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Yamada T
Sophia Univ. Tokyo Jpn
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Yamada T
Ntt Basic Research Laboratories:(present Address) Ntt Opto-electronics Laboratories
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Yamada T
Tokai Univ. Hiratsuka Jpn
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Yamada Tomoyuki
Research Laboratory Oki Electric Industry Co. Ltd.
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Morita Shigenori
Department Of Electronic Engineering Osaka University
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Yamada T
Department Of Electrical And Electronics Engineering Sophia University
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Morita S
Department Of Electrical Engineering Nagoya University
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Ohsaki Shintaro
Department Of Electrical And Electronic Engineering And Information Engineering Nagoya University
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