Oxidation of Si(100) Surfaces with Bi and Ag Overlayers
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概要
- 論文の詳細を見る
Desorption of Bi and Ag deposited on Si(100) surfaces has been investigated by Auger electron spectroscopy for heat treatment in an oxygen atmosphere. Bi was desorbed from the Si surface at substrate temperature T_s of 450〜500℃, andAg was desorbed at T_s of 510〜560℃. The RHEED patterns for Ag overlayers before the desorption suggest that Ag atoms rearrange in the [011] direction.
- 社団法人応用物理学会の論文
- 1990-07-20
著者
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Yamada Tomoyuki
Research Laboratory Oki Electric Industry Co. Ltd.
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ABE Hitoshi
Research Laboratory, Oki Electric Industry Co., Ltd.
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Yamada Tomoyuki
Research & Development Group Oki Electric Industry Co. Ltd.
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Abe Hitoshi
Research & Development Group Oki Electric Industry Co. Ltd.
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- Authors' Reply
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