Improvement of Crystal Quality of RF-Plasma-Assisted Molecular Beam Epitaxy Grown Ga-Polarity GaN by High-Temperature Grown AIN Multiple Intermediate Layers

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-04-15

著者

• Nakamura Shuji

  Department Of Research And Development Nichia Chemical Industries Ltd.

• Kikuchi Akihiko

  Department Of Electrical And Electronics Engineering Sophia University

• Kikuchi A

  Institute Of Advanced Biomedical Engineering And Science Tokyo Women's Medical University

• Kishino Katsumi

  Department Of Electrical And Electronic Engineering Sophia University

• Yamada T

  Tokyo Inst. Of Technol. Tokyo Jpn

• Yamada T

  Tokyo Inst. Technol. Tokyo Jpn

• Yamada T

  Daido Inst. Technol. Nagoya Jpn

• Yamada T

  Sophia Univ. Tokyo Jpn

• Yamada T

  Ntt Basic Research Laboratories:(present Address) Ntt Opto-electronics Laboratories

• Yamada T

  Tokai Univ. Hiratsuka Jpn

• Kikuchi A

  Department Of Electrical And Electronic Engineering Sophia University

• Kikuchi A

  Institute Of Advanced Biomedical Engineering And Science Center Of Excellence (coe) Program For The

• Yamada Tomoyuki

  Research Laboratory Oki Electric Industry Co. Ltd.

• Nagahama Shin‐ichi

  Nitride Semiconductor Research Laboratory Opto-electronics Products Division Nichia Corp.

• Yamada T

  Department Of Electrical And Electronics Engineering Sophia University

• KIKUCHI Akihiko

  Electrical and Electronics Engineering, Sophia University

• YAMADA Takayuki

  Electrical and Electronics Engineering, Sophia University

• NAKAMURA Shinichi

  Electrical and Electronics Engineering, Sophia University

• KUSAKABE Kazuhide

  Electrical and Electronics Engineering, Sophia University

• SUGIHARA Daisuke

  Electrical and Electronics Engineering, Sophia University

• KISHINO Katsumi

  Electrical and Electronics Engineering, Sophia University

• SUGIHARA Daisuke

  Department of Electrical and Electronics Engineering, Sophia University

• KUSAKABE Kazuhide

  Department of Electrical and Electronics Engineering, Sophia University

• Nakamura Shuhei

  Department Of Electrical And Electronic Engineering Mie University

• Nakamura S

  Department Of Electrical And Electronic Engineering Yamaguchi University

• Kusakabe K

  Department Of Electrical And Electronics Engineering Sophia University

• Nakamura Shigeru

  Central Research Laboratory Hitachi Ltd.

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