Electron-Beam-Induced Deposition of Fe Nanoparticles and Thin Films on SrTiO3 Substrates
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概要
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We performed electron-beam-induced deposition (EBID) of Fe(CO)5 on cleaned Nb-doped SrTiO3(100) substrates at 673–873 K inside an ultrahigh vacuum transmission electron microscopy (UHV-TEM) system. When the substrate temperature is maintained at 673–723 K, broad-beam irradiation resulted in the fabrication of Fe nanoparticles that subsequently grew into a polycrystalline $\alpha$-Fe film. Focused-beam irradiation was successful only at the beginning of the beam irradiation due to the charging up of the substrates. Deposition did not occur when the substrate temperature was increased to 773–873 K.
- 2007-09-30
著者
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KOGUCHI Nobuyuki
National Institute for Materials Science
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Furuya Kazuo
National Institute For Materials Science
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MITSUISHI Kazutaka
National Institute for Materials Science
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Tanaka Miyoko
National Institute For Materials Science
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TAKEGUCHI Masaki
National Institute for Materials Science
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Shimojo Masayuki
Saitama Institute of Technology, Fukaya, Saitama 369-0293, Japan
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Tanaka Miyoko
National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Furuya Kazuo
National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Koguchi Nobuyuki
National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Mitsuishi Kazutaka
National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Shimojo Masayuki
Saitama Institute of Technology, 1690 Fusaiji, Fukaya, Saitama 369-0293, Japan
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Takeguchi Masaki
National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Takeguchi Masaki
National Institute for Material Science, 3-13 Sakura, Tsukuba 305-0003, Japan
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