High Resolution Transmission Electron Microscopy Study on the Structure of Ge Nanoparticles by Using an Ultrahigh Vacuum-Molecular Beam Epitaxy-Transmission Electron Microscope System
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概要
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Ge nanoparticles were deposited on thinned Si substrates in an ultrahigh vacuum molecular beam epitaxy instrument (UHV-MBE) and transferred into an UHV-field emission transmission electron microscope (UHV-FE-TEM) through an UHV-transferring system. TEM observation indicated that the Ge nanoparticles had a round shape and were 2 to 5 nm in diameter. The crystalline Ge nanoparticles exhibited single crystals, single-twinned crystals, and decahedral multi-twinned particles (MTPs). It was found that the crystal structure of some nanoparticles changes from a diamond structure to a novel structure, which is proposed to be a β-Sn structure, with a=0.38 nm and c=0.71 nm. The particles with the new structure are not formed when the substrate temperature is above 370℃. The structure of MTPs has been discussed. Some Ge nanocrystals even became amorphous and then fluctuated continually during HRTEM observation.
- 社団法人応用物理学会の論文
- 1999-12-30
著者
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Takeguchi Masaki
High Voltage Electron Microscopy Station National Institute For Materials Science
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FURUYA Kazuo
National Research Institute for Metals
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Furuya Kazuo
National Institute For Materials Science
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TAKEGUCHI Masaki
Advanced Nano-characterization Center, National Institute for Materials Science
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Takeguchi M
National Institute For Materials Science
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TAKEGUCHI Masaki
National Institute for Materials Science
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WU Yuan
National Research Institute for Metals
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Tanaka Miyoko
High Voltage Electron Microscopy Station National Institute For Materials Science
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Takeguchi Masaki
Department Of Applied Physics Faculty Of Engineering Osaka University
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Takeguchi Masaki
National Institute for Material Science, 3-13 Sakura, Tsukuba 305-0003, Japan
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