Resolution in New Nanofabrication Technique Combining Electron-Beam-Induced Deposition and Low-Energy Ion Milling
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-30
著者
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FURUYA Kazuo
National Research Institute for Metals
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Furuya Kazuo
High Voltage Electron Microscopy Station National Institute For Materials Science
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MITSUISHI Kazutaka
National Institute for Materials Science
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Tanaka Miyoko
National Institute For Materials Science
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Takeguchi M
National Institute For Materials Science
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TAKEGUCHI Masaki
National Institute for Materials Science
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SHIMOJO Masayuki
On leave from Precision and Intelligence Laboratory, Tokyo Institute of Technology
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