Mechanisms of Crystalline Iron Oxide Formation in Electron Beam-Induced Deposition
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概要
- 論文の詳細を見る
The effects of water vapor and oxygen addition to an iron pentacarbonyl precursor on the formation of iron oxide deposits were studied to understand the mechanism of iron oxide formation in electron beam-induced deposition. The water vapor addition markedly reduced the carbon content in the deposits and led to the formation of crystalline iron oxide. However, the oxygen addition had little effect on the composition and structure of the deposits. This suggests that iron acts as a catalyst and a chemical reaction similar to the water gas reaction occurs during the electron beam-induced deposition.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-09-30
著者
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Takeguchi Masaki
High Voltage Electron Microscopy Station National Institute For Materials Science
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Furuya Kazuo
High Voltage Electron Microscopy Station National Institute For Materials Science
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SHIMOJO Masayuki
High Voltage Electron Microscopy Station, National Institute for Materials Science
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MITSUISHI Kazutaka
High Voltage Electron Microscopy Station, National Institute for Materials Science
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Tanaka Miyoko
High Voltage Electron Microscopy Station National Institute For Materials Science
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Furuya Kazuo
High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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Shimojo Masayuki
High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba, Ibaraki 305-0003, Japan
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