Nanodot and Nanorod Formation in Electron-Beam-Induced Deposition Using Iron Carbonyl
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概要
- 論文の詳細を見る
Electron-beam-induced deposition is a promising technique for producing position-controlled nanometer-sized structures without using masks. In this study, electron-beam-induced deposition was carried out using iron carbonyl, and nanometer-sized dots and freestanding rods were fabricated. The nanostructures were characterized by scanning and transmission electron microscopy. The size of the nanodots as a function of beam irradiation time, and the width of the freestanding rods as a function of beam scan speed are reported. Nanocrystal formation under an area scan is also reported.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-07-15
著者
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Takeguchi Masaki
High Voltage Electron Microscopy Station National Institute For Materials Science
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Zhang Wei
High Voltage Electron Microscopy Station National Institute For Materials Science
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Furuya Kazuo
High Voltage Electron Microscopy Station National Institute For Materials Science
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SHIMOJO Masayuki
High Voltage Electron Microscopy Station, National Institute for Materials Science
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MITSUISHI Kazutaka
High Voltage Electron Microscopy Station, National Institute for Materials Science
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Tanaka Miyoko
High Voltage Electron Microscopy Station National Institute For Materials Science
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Zhang Wei
High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan
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Tanaka Miyoko
High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan
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Furuya Kazuo
High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan
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Mitsuishi Kazutaka
High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan
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Takeguchi Masaki
High Voltage Electron Microscopy Station, National Institute for Materials Science, 3-13 Sakura, Tsukuba 305-0003, Japan
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